Stage type Mechanical bearing ball slide
Control type Optical mouse
Travels
X-Axis 8"
Y-Axis 6"
Z-Axis 6"
Worktable load 55 lbs.
Worktable size 16" x 12"
Stage glass size 9.50" x 7.50"
Scale resolution .00004"
Voltage 105 to 125 volts AC
50/60 Hz, Single phase
Current 15 amps maximum
Consumption 1875 watts maximum
Temperature range 60 to 90 deg. F
Recommended temperature 68 deg. F
Maximum rate of change 2 deg. F
Relative humidity 30 to 80%
Vibration (accelerations not to exceed) 5000 micro-g below 10 Hz
Low Magnification
Magnification ratio 11
Field of view (diagonal) 400 deg.
Depth of focus 100 deg.
Focal ratio 1/22
Lateral distortion Less than .03%
Working clearance 4"
(CONT.)
High Magnification
Magnification ratio 81
Field of view (diagonal) .050 deg.
Depth of focus .010 deg.
Focal ratio (profile illumination)1/22
Focal ratio (other illumination) 1/4
Lateral distortion Less than .03%
Working clearance 4"
Measurement Speed
Maximum speed, X & Y axes 1" per second
Maximum speed, Z axis 5" per second
Processing speed 4 XY data points per second
Autofocus speed 3 seconds
Overall XY Stage Accuracy
XY Stage accuracy +.0002"
Maximum error within 1"
Field of View Accuracy
Low mag +.0002"
High mag +.00002"
Autofocus Accuracy
Autofocus accuracy +.0003"
Squareness to XY plane Not to exceed .0003"
Overall dimensions 34" L x 40" W x 67" High
Approximate weight 1,060 lbs.
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Dual magnification optical system
Profile illumination (backlighting)
Surface illumination
Fresnel quadrature illumination
Video camera
Computer & software
NOTE Removed from clean room environment. Excellent condition. A video t
ape of the
machine in operation is available upon request.
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